State-of-the-art RHEED pattern analysis

Reflection high-energy electron diffraction (RHEED) is a technique for monitoring the growth of thin films and the kSA 400 is an analytical RHEED system designed to extract real-time data about the thin film surface by analysis of the static or evolving diffraction pattern. The kSA 400 combines a CCD camera with high resolution, speed, and sensitivity with state-of-the-art analysis software. The kSA 400 makes it possible to analyze any image feature and controls the electron gun for such tasks as acquiring RHEED rocking curves. Seamless integration between hardware and software makes user operation simple. The kSA 400 is the thin film industry’s leading analytical RHEED system and is used in MBE, PLD, PVD, and surface science chambers around the world.

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